1、東南大學(xué)碩士學(xué)位論文快速納米薄膜成形裝置研制及（Ba、Sr）TiO薄膜成形性研究姓名：丁歷申請(qǐng)學(xué)位級(jí)別：碩士專業(yè)：材料加工工程指導(dǎo)教師：廖恒成20060401AbstractAbstractDevelopmentofhigh—ratefomlerfornanothinfiImsandstudyontheformabilityof(Ba，Sr)TiOathinfiJmDTNGLiSupervisedbyLIAOHengchengSouth

2、eastUniversityDuetoitshi【ghdielectricconstantlowleakagecurrentlowdielectricloss，andadjustableCurietemperature，Bariumstrontiumtitanate(BaSr)Ti03(BSDferroeleetricmaterialhaswicIeapplicationsindynamicrandomaccessmemories(DR

3、AM)phaseshifterandthermalinfraredimagerPreparationofBSTfilmsbySolgelbecomesoneofhotpointsofmaterialsresearchdomesticandabroad，duetoitsacenratestoichiometricproportionandeasycontr01Toimprovethefunctionsoftheordilla=ryspin

4、coaterahighrateformerfornanothinfilmsWasdevelopedintegratinghighrateformation，photolysisandthermolysisofnanothinfilmsBa07Sro3T10303sa3wetgelpowder謝mandwithoutchelatingagent(HAcAc)werepreparedbysolgel，IIsingBa(Ac)2，Sr(Ac)

5、2andTi(OC4H9)4assotlrcematerialsTheeffectofHAeAconthethermolysisandcrystallizationcharacteristicsofBSTwasinvestigatedbyDSCTGXRDandSEMResultsindicatedthat謝tlltheadditionofHAcAc，thehydrolyticactivityofTi(OC4n9)4becamemuchw

6、eakerandthetemperaturerangeofthermolysiswasenlargedandthemainexothermalreactionsduringthermolysismovedtohightemperatureMoreoverduringthephaseevolutionofcrystallizationofBST，twopathstoformperovskitephasewerepointedoutname

7、lydirectdecompositionofmonointermediatesordiffusionreactionamongmultiintermediatesrespectivelyChelatingagents(HAcAc)hadaninfluenceonthecrystallizationcharacteristicofBSTtransferringfromwetgeltopowdersBa07St03T103(BSnthil

8、lfilmswerepreparedonSi(100)substratebysolgeltechniquewithprecursorsthathavedifferentconcentrationspHvaluesand、ⅣimdifferentspinspeedsTheinfluenceofBSTconcentrationinprecursorpHvalueofthesolutionandspinspeedontheformabilit

9、yofBSTthinfilmWnsinvestigatedbyXRD，SEMandAFM，ResetsshowedthatthesurfaceofBSTthinfilmwasstillcompactedandhomogeneous，butlocalimpurityphasewithlargergrainsizewasemerged稍tllincreaseintheBSTconcentrationinprecursor；withdecre

10、aseinpHvalue(26)ofprecursorvisibleeonglobationofgrainswasobserveded；whenthespinspeedWastoolowthesurfaceoffilmwasnothomogeneousandtoohighSpiIlspeedwouldcausecrackoffilmBycomparisonitWasconcludedthatwhentheBSTconcentration

11、inprecursorwasO45MpHvalueWas403andspinspeedwas3000rpmtheBa07Sro3Ti03thinfilmWascrack—fTee，compacted，andhadalmostcompleteperovskitephaseandhomogeneousgrainsizedistributionKeyword：nanothinfilm，bariumstrontiumtitanate，sol—g